Direct Patterning of Sol-Gel CuxO/IGZO Heterojunctions for Multi-Valued Logic via Self-Assembled Monolayers
발표자
백석현 (아주대학교)
연구책임자
박성준 (아주대학교)
초록
내용
In this study, we introduce a ternary inverter based on a CuxO/IGZO heterojunction, fabricated via a photolithography-free, solution-based process combining sol-gel deposition with self-assembled monolayer (SAM) patterning. This approach not only preserves the electrical performance of the transistors but also offers scalability and cost-effectiveness. Structural analysis confirms the formation of a smooth, partially overlapped heterojunction interface.
Depth-resolved X-ray photoelectron spectroscopy (XPS) reveals a gradient in oxidation states within the CuxO layer, which facilitates enhanced hole injection at the IGZO interface. This promotes efficient hole transport and enables negative differential transconductance (NDT), a critical mechanism for MVL operation. These results underscore the potential of scalable, low-cost, solution-processable oxide semiconductors for next-generation MVL electronics.