High dielectric constant and process stability are essential for dielectric materials. Polymer dielectrics offer excellent processability but suffer from intrinsically low dielectric constants, while metal oxide dielectrics provide higher dielectric constants but often show poor thickness control and reproducibility when solution-processed. In this work, we develop a hybrid dielectric by blending a newly synthesized UV-responsive polymer with a metal oxide precursor to overcome these limitations. UV-induced chemical reactions and thickness reproducibility were evaluated using UV–visible spectroscopy. Electrical measurements show a dielectric constant of up to ~10 at 1 MHz and an ON/OFF current ratio on the order of 108, demonstrating stable insulating performance. This hybrid dielectric system provides a promising strategy for achieving both high dielectric performance and reliable solution-process stability.