IDS3 Photoresist: 50 Years of Innovation and the Next 50 Years
In celebration of the 50th anniversary of the Polymer Society of Korea (PSK), this special session highlights the historical evolution of photoresists over the past half-century and explores the future trajectory of advanced lithography materials. As we look forward to the next 50 years, the session will focus deeply on next-generation patterning technologies, particularly Chemically Amplified Resists (CAR) and Metal-Oxide Resists (MOR). Leading industry experts and academic researchers will present recent achievements and explore the fundamental mechanisms behind advanced EUV photoresists, process simulations, and innovative structural designs. By bringing together pioneers in the semiconductor materials industry, this session aims to foster interdisciplinary collaboration and stimulate discussion on the future challenges and opportunities in extreme ultraviolet (EUV) lithography.
Topics will include:
- Electro-driven chemical reactions and creatively structured MOR materials
- Photoresist process simulation research
- Directed Self-Assembly
- EUV PR evaluation platform and material evaluation
Keynote Speakers:
- TBD (Dongjin Semichem, Republic of Korea)
- Sumin KIM (Samsung Electronics, Republic of Korea)
- Gregory DENBEAUX (University at Albany, USA)
Invited Speakers:
- Hyundam JEONG (Chonnam National University, Republic of Korea)
- Sumi HEO (DGIST, Republic of Korea)
- Hyoseon SUH (MEC, Belgium)
- Youngmin YOU (Yonsei University, Republic of Korea)
- Myoung-Ung KIM (Inha University, Republic of Korea)
- Sangsul LEE (POSTECH, Republic of Korea)











